高能CO2激光腔镜高反介质薄膜的传输特性

推进技术 ›› 2007, Vol. 28 ›› Issue (5): 555-557.

高能CO₂激光腔镜高反介质薄膜的传输特性

彭玉峰,程祖海,崔金玲,张毅,张虎,余文峰

华中科技大学光电子科学与工程学院湖北武汉430074;河南师范大学物理与信息工程学院;河南新乡453007;华中科技大学光电子科学与工程学院湖北武汉430074;河南师范大学物理与信息工程学院;河南新乡453007;河南师范大学物理与信息工程学院;河南新乡453008;河南师范大学物理与信息工程学院;河南新乡453009;华中科技大学光电子科学与工程学院湖北武汉430074

发布日期:2021-08-15
基金资助:
国家“九七三”项目(61328)

Optical transmission characteristics of high reflective dielectric coatings for high energy CO₂ laser mirror

Inst.of Optoelectronics Science and Engineering,Huazhong Univ.of Science andTechnology,Wuhan 430074,China;Coll.of Physics and Information Engineering,Henan Normal Univ.,Xinxiang 453007,China;Inst.of Optoelectronics Science and Engineering,Huazhong Univ.of Science andTechnology,Wuhan 430074,China;Coll.of Physics and Information Engineering,Henan Normal Univ.,Xinxiang 453007,China;Coll.of Physics and Information Engineering,Henan Normal Univ.,Xinxiang 453008,China;Coll.of Physics and Information Engineering,Henan Normal Univ.,Xinxiang 453009,China;Inst.of Optoelectronics Science and Engineering,Huazhong Univ.of Science andTechnology,Wuhan 430074,China

Published:2021-08-15

摘要/Abstract

摘要： 为了获得适用于高能CO2激光器的高抗破坏阈值高反薄膜,以10.6μm高反膜ZnSe/YbF3,PbTe/BaF2膜系为例,数值模拟了激光在高反介质膜中的传输的场特性;给出了激光在多层介质膜中的场强分布、温度场分布及热应力分布。结果表明硅镜基体上的PbTe/BaF2膜系所需膜层厚度小、膜层数少,反射率可高达99.98%。

关键词: 二氧化碳激光器;反射镜;介质薄膜;激光损伤+

Abstract: In order to achieve high-reflective coating with high quality and high damage threshold in high-energy CO2 laser,taking example for ZnSe/YbF3 and PbTe/BaF2 dielectric coatings at 10.6 μm, the transmission characteristics of laser field in the high reflective coatings are numerically simulated.The laser intensity distribution within the coatings,temperature and thermal stress distribution caused by laser filed are obtained and discussed.The calculation results show that silicon mirror with PbTe/BaF2 coatings has the advantages of less coating thickness,higher reflectivity,up to 99.98% compared with ZnSe/YbF3.

Key words: Carbon dioxide laser;Reflectoscope;Dielectric film;Laser damage+

彭玉峰,程祖海,崔金玲,张毅,张虎,余文峰. 高能CO₂激光腔镜高反介质薄膜的传输特性[J]. 推进技术, 2007, 28(5): 555-557.

高能CO₂激光腔镜高反介质薄膜的传输特性

Optical transmission characteristics of high reflective dielectric coatings for high energy CO₂ laser mirror

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