小型感性耦合射频等离子体中和器的实验研究 *
贺建武,马隆飞,薛森文,章楚,段俐,康琦
Experimental Studyofa Mini Inductively Coupled Radio-Frequency Plasma Neutralizer
HE Jian-wu 1,2,MA Long-fei 1,2,XUE Sen-wen 1,2,ZHANG Chu 1,2,DUAN Li 1,2,KANG Qi 1,2
推进技术 . 2018, (7): 1673 -1680 .