Abstract: In order to study the distribution of static magnetic and microwave electromagnetic fields in the electron cyclotron resonance(ECR) neutralizer, and to design reasonable magnetic circuit structure to form ECR region and meanwhile to make the strong region of microwave electric field overlap the ECR region,finite element analysis software was used to compute the static magnetic and microwave electromagnetic fields. The computational results show that both the sizes of permanent magnet and soft magnetic alloy affect the distribution of ECR region. Also the longer the L-typed antenna inserts into, the stronger the electric fields are. When the microwave frequency is 4.2GHz, the magnetic circuit structure composed of six same bar permanent magnets with 12mm in length, 8mm in width, 5mm in height and soft magnetic alloy can produce reasonable ECR region. With L-typed antenna in length of 5mm, the strong region of microwave electric field overlaps the ECR region. 

Key words: Electron cyclotron resonance;Neutralizer; Static magnetic field; Electromagnetic field

摘要： 为了研究电子回旋共振中和器内静磁场和微波电磁场的分布规律,设计合理的磁路结构以形成电子回旋共振区,并使微波强电场区与电子回旋共振区重合,采用有限元分析软件对中和器内的静磁场和微波电磁场进行了数值计算。计算结果表明:永磁体及磁轭的尺寸均影响电子回旋共振区的分布；天线伸入长度越长,微波电场越强。微波频率为4.2GHz时,六块相同的长12mm,宽8mm ,高5mm的条形永磁铁与磁轭组成的磁路结构,可以产生合理的电子回旋共振区。L型天线伸入长度为5mm时微波强电场区可与电子回旋共振区重合。 

关键词: 电子回旋共振;中和器;静磁场;电磁场 