推进技术 ›› 2013, Vol. 34 ›› Issue (4): 572-576.

• 新型动力 • 上一篇    

MEMS固体化学微推进阵列的微冲量测试技术

李创新1,2,余协正1,3,叶迎华1,沈瑞琪1,王成玲1,朱莹1   

  1. 南京理工大学 化工学院,江苏 南京 210094;南京理工大学 化工学院,江苏 南京 210094;南京理工大学 化工学院,江苏 南京 210094;南京理工大学 化工学院,江苏 南京 210094;南京理工大学 化工学院,江苏 南京 210094;南京理工大学 化工学院,江苏 南京 210094
  • 发布日期:2021-08-15
  • 作者简介:李创新(1978—),男,硕士,讲师,研究领域为MEMS器件、火工品性能测试技术及弹药检测教学。E-mail:lcxjxsg@163.com通讯作者:叶迎华(1962—),女,研究员,研究领域为MEMS火工技术,含能材料的燃烧和爆炸。 E-mail:yyinghua@mail.njust.edu.cn
  • 基金资助:
    航天科技创新基金项目(CASC201105)。

Micro-Impulse Measurement of MEMS Solid Propellant Thruster Array

  1. School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
  • Published:2021-08-15

摘要: 为了评价MEMS(Micro Electro Mechanical Systems)固体化学微推进阵列的推进性能,对其单元微冲量的精确测试显得尤为重要。在传统冲击摆的基础上,考虑微推进器推力和燃气射流冲击力之间的比例关系,设计了一套适用于MEMS固体化学微推进阵列单元微冲量的间接测试装置,并成功用于6×6规格(单元集成度为36个/cm2)微推进阵列的实际测试中。结果表明:典型实验数据下的待测微冲量为2.5442×10-4Ns,相对误差小于5%;实测8个单元的微冲量平均值为2.5574×10-4 N·s,相对偏差较小,具有很好的重复性。 

关键词: 微推进器;冲量;冲击摆;转动惯量 

Abstract: In order to evaluate the propulsion performance of MEMS (Micro Electro Mechanical Systems) solid propellant thruster array, accurate measurement of unit micro-impulse is particularly important. Based on the traditional ballistic pendulum, as well as considering the relationship between the thrust and the impact of the gas jet, an indirect micro-impulse measuring device was designed. It was successfully used in the measurement of 6mm×6mm (integration density is 36/cm2) MEMS solid propellant thruster array. The results show that the unknown micro-impulse is 2.5442×10-4N·s under typical experimental datum, and the measurement accuracy meets the requirement of ballistic pendulum system in which the relative error is below 5%. The average impulse of 8test units is 2.5574×10-4 N·s with small relative deviation and good reproducibility. 

Key words: Micro-thruster; Impulse; Ballistic pendulum; Moment of inertia