Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster

Journal of Propulsion Technology ›› 2017, Vol. 38 ›› Issue (7): 1641-1647.

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Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster

Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China; Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China,Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China; Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China,Key Laboratory of Mico/Nano Systems for Aerospace，Ministry of Education，Northwestern Polytechnical University，Xi’an 710072，China; Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems，Northwestern Polytechnical University，Xi’an 710072，China,Key Laboratory of Mico/Nano Systems for Aerospace，Ministry of Education，Northwestern Polytechnical University，Xi’an 710072，China; Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems，Northwestern Polytechnical University，Xi’an 710072，China,Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China; Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China,Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China; Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China and Shanghai Engineering Centre for Microsatellite，Shanghai 201203，China; Key Lab of Microsatellites，Chinese Academy of Sciences，Shanghai 201203，China

Published:2021-08-15

MEMS冷气推力器的制作和热性能研究

康宝鹏^1,2,赵学聪^1,2,乔大勇^3,4,马志波^3,4,李昭^1,2,吴树范^1,2,张传鑫^1,2

上海微小卫星工程中心，上海 201203; 中科院微小卫星重点实验室，上海 201203,上海微小卫星工程中心，上海 201203; 中科院微小卫星重点实验室，上海 201203,西北工业大学空天微纳系统教育部重点实验室，陕西西安 710072; 西北工业大学陕西省微/纳米系统重点实验室，陕西西安 710072,西北工业大学空天微纳系统教育部重点实验室，陕西西安 710072; 西北工业大学陕西省微/纳米系统重点实验室，陕西西安 710072,上海微小卫星工程中心，上海 201203; 中科院微小卫星重点实验室，上海 201203,上海微小卫星工程中心，上海 201203; 中科院微小卫星重点实验室，上海 201203,上海微小卫星工程中心，上海 201203; 中科院微小卫星重点实验室，上海 201203

作者简介:康宝鹏，男，硕士，工程师，研究领域为MEMS冷气推进器系统。
基金资助:
中科院微小卫星重点实验室开放课题基金(KFKT13SYS1)；陕西省微/纳米系统重点实验室开放课题基金

Abstract

Abstract: In order to study thermal property of cold gas thruster based on MEMS(Micro Electro Mechanical Systems)，the design and fabrication of a MEMS-based cold thruster are presented. The dimension and mass of this fabricated thruster is 40mm×20mm×1mm and 1g respectively，which would be integrated into micro cold propulsion system. The thermal property of thruster heater which would be used to increase specific impulse of propulsion system was simulated and the test to verify the simulation was implemented. The results show that the heater could warm the thruster chamber up to 80℃ through 230s heating at ambient environment and 8V drive，which agree well with simulation results. Based on results in ambient environment，better thermal property of thruster heater can be expected in vacuum environment.

Key words: MEMS；Micro thruster；Fabrication；Thruster heater；Thermal property

摘要： 为了研究MEMS(Micro Electro Mechanical Systems)冷气推力器的热性能，介绍了一种MEMS冷气推力器的设计和制作，该推力器体积小(40mm×20mm×1mm)，重量轻(1g)，功耗低。对推力器加热丝不同电压和环境下进行了热仿真，对组装到电路板上的推力器模块进行了热测试。结果表明:常温常压下，8V的驱动电压，经过230s后，推力器加热丝的温度可达到80℃以上，与仿真结果趋势相同，可预见真空中，8V电压下可满足推进剂对加热腔温度的需求。

关键词: MEMS；微推力器；制作；加热丝；热特性

KANG Bao-peng^1,2,ZHAO Xue-cong^1,2,QIAO Da-yong^3,4,MA Zhi-bo^3,4,LI Zhao^1,2,WU Shu-fan^1,2,ZHANG Chuan-xin^1,2. Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster[J]. Journal of Propulsion Technology, 2017, 38(7): 1641-1647.

康宝鹏,赵学聪,乔大勇,马志波,李昭,吴树范,张传鑫. MEMS冷气推力器的制作和热性能研究[J]. 推进技术, 2017, 38(7): 1641-1647.

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Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster

MEMS冷气推力器的制作和热性能研究

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