脉冲激光输出模式对介质薄膜损伤的影响

推进技术 ›› 2007, Vol. 28 ›› Issue (5): 558-560.

脉冲激光输出模式对介质薄膜损伤的影响

曹华梁,程祖海,叶克飞,余亮英,陈佳元

中科技大学武汉光电国家实验室湖北武汉430074;中科技大学武汉光电国家实验室湖北武汉430075;中科技大学武汉光电国家实验室湖北武汉430076;中科技大学武汉光电国家实验室湖北武汉430077;中科技大学武汉光电国家实验室湖北武汉430078

发布日期:2021-08-15
基金资助:
国家“九七三”项目(61328)

Effect of pulse laser mode on damage of dielectric thin film

Wuhan National Laboratory for Optoelectronics,Huazhong Univ. of Science and Technology,Wuhan 430074,China;Wuhan National Laboratory for Optoelectronics,Huazhong Univ. of Science and Technology,Wuhan 430075,China;Wuhan National Laboratory for Optoelectronics,Huazhong Univ. of Science and Technology,Wuhan 430076,China;Wuhan National Laboratory for Optoelectronics,Huazhong Univ. of Science and Technology,Wuhan 430077,China;Wuhan National Laboratory for Optoelectronics,Huazhong Univ. of Science and Technology,Wuhan 430078,China

Published:2021-08-15

摘要/Abstract

摘要： 采用单横模(TEM01)和多模横向激励高气压(TEA)脉冲二氧化碳激光器和不同焦距的透镜对10.6μm的增透膜进行了破坏实验,对破坏样品进行了显微分析,研究了不同激光模式和不同焦距透镜对薄膜破坏的影响。实验结果表明,在短焦距透镜聚焦时,相同能量密度的单横模激光脉冲焦距前比焦距后更容易造成薄膜的损伤,破坏阈值相差5 J/cm2;使用长焦距透镜聚焦时,在单模激光脉冲和多模激光脉冲幅照下薄膜的损伤阈值基本相同,但比使用短焦距单模激光测量到的损伤阈值高。

关键词: 激光损伤+;介质薄膜;破坏阈值;激光模式

Abstract: Laser induced damage in 10.6 μm reflection reducing coating was observed using single mode(TEM01) and multi-mode transversely excited atmospheric(TEA) carbon dioxide laser and different focal length optical lens.Damage samples were analyzed by microscope.Effect of laser mode and focal length on damage of dielectric thin film was studied.The results show that single mode laser radiation of same energy density is easier to induce damage for sample in the front of focal spot of short-focus lens than that behind focal spot of short-focus lens.The deviation of damage threshold was 5J/cm2.When using long-focus lens,the measured damage threshold of film is similar with single mode laser radiation or multimode laser radiation,but it is higher than that with single mode laser radiation when using short-focus lens.

Key words: Laser induced damage+;Dielectric film;Damage threshold;Laser mode

曹华梁,程祖海,叶克飞,余亮英,陈佳元. 脉冲激光输出模式对介质薄膜损伤的影响[J]. 推进技术, 2007, 28(5): 558-560.